Thanks for your advice.

For the bms file, I did open and read it.
There are information for batch processing of ShapeAnalysisModule.

In my trial, the first error occured with the log "Cannot open file: ShapeAnalysisModule_id26038.bms ".
obviously, the bms file were generated, and then the following step should be loading that file I think.
As I mentioned already, that file were generated in Slicer3 folder.
 
The first error was the reasson for the MeshMath error I guess.
 
For the Data I used,
It is the tutorial data posted on SPHARM-PDM Toolbox downloads.
So, I think the data would not be wrong, and the process did not enter at the SetPostProcess step.
 
And you said that I can discard the bms file.
But I think it would be used to proceed the next following steps. Don't you?
 
The following log is the full contents of the error.
 
-------------------------------------------------------------------------------------------
------ Shape Analysis Module start -----

Computing ShapeAnalysisModule...
/usr/local/bin/spharm/ShapeAnalysisTest/ShapeAnalysis_Results
/usr/local/bin/spharm/ShapeAnalysisTest/ShapeAnalysis_Results/
192
 
ShapeAnalysisModule_id2731.bms
ShapeAnalysisModule_id2731.bms
Number of Datas: 4
 Executing BatchMake...
Cannot open file: ShapeAnalysisModule_id2731.bms
 Executing BatchMake: Done!
ShapeAnalysisModule_id2731.bms

Execute Meshmath...
Error: Could not run MeshMath:
No such file or directory
Error: Could not run MeshMath:
No such file or directory
Error: Could not run MeshMath:
No such file or directory
Error: Could not run MeshMath:
No such file or directory
Error: Could not run MeshMath:
No such file or directory
Error: Could not run MeshMath:
No such file or directory
Error: Could not run MeshMath:
No such file or directory
Error: Could not run MeshMath:
No such file or directory
Error: Could not run MeshMath:
No such file or directory
Error: Could not run MeshMath:
No such file or directory
Error: Could not run MeshMath:
No such file or directory
Error: Could not run MeshMath:
No such file or directory
Error: Could not run MeshMath:
No such file or directory
Error: Could not run MeshMath:
No such file or directory
Error: Could not run MeshMath:
No such file or directory
Error: Could not run MeshMath:
No such file or directory
Error: Could not run MeshMath:
No such file or directory
Error: Could not run MeshMath:
No such file or directory
Error: Could not run MeshMath:
No such file or directory
Error: Could not run MeshMath:
No such file or directory
Error: Could not run MeshMath:
No such file or directory
Error: Could not run MeshMath:
No such file or directory
Error: Could not run MeshMath:
No such file or directory
Error: Could not run MeshMath:
No such file or directory
meshmath template
-------------------------------------------